scholarly article | Q13442814 |
P356 | DOI | 10.1016/J.APSUSC.2006.12.004 |
P2093 | author name string | Nicolas Martin | |
Fabrice Sthal | |||
Guy Terwagne | |||
Jamal Takadoum | |||
Jean-Marie Chappé | |||
Jan Lintymer | |||
P433 | issue | 12 | |
P921 | main subject | thin film | Q1137203 |
titanium | Q716 | ||
P304 | page(s) | 5312-5316 | |
P577 | publication date | 2007-04-01 | |
P1433 | published in | Applied Surface Science | Q2772524 |
P1476 | title | Titanium oxynitride thin films sputter deposited by the reactive gas pulsing process | |
P478 | volume | 253 |
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