Wikidata entity: Q867398
| P1343 | described by source | ... | Q1428079 (International Technology Roadmap for Semiconductors) | International Technology Roadmap for Semiconductors |
| P156 | followed by | ... | Q25991746 (150 nm lithography process) | 150 nm lithography process |
| P155 | follows | ... | Q25991747 (220 nm lithography process) | 220 nm lithography process |
| P176 | manufacturer | ... | Q691592 (GlobalFoundries) | GlobalFoundries |
| P176 | manufacturer | ... | Q4310655 (Mikron Group) | Mikron Group |
| P279 | subclass of | ... | Q622938 (photolithography) | photolithography |
| P646 | Freebase ID | /m/026wfnp |
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log id: 9684674