Wikidata entity: Q25991740
| P156 | followed by | ... | Q1059061 (22 nm lithography process) | 22 nm lithography process |
| P155 | follows | ... | Q2652244 (32 nm lithography process) | 32 nm lithography process |
| P176 | manufacturer | ... | Q691592 (GlobalFoundries) | GlobalFoundries |
| P176 | manufacturer | ... | Q713418 (TSMC) | TSMC |
| P279 | subclass of | ... | Q622938 (photolithography) | photolithography |
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log id: 8377988