Wikidata entity: Q2652244
| P1343 | described by source | ... | Q1428079 (International Technology Roadmap for Semiconductors) | International Technology Roadmap for Semiconductors |
| P156 | followed by | ... | Q25991740 (28 nm lithography process) | 28 nm lithography process |
| P155 | follows | ... | Q25991741 (40 nm lithography process) | 40 nm lithography process |
| P176 | manufacturer | ... | Q691592 (GlobalFoundries) | GlobalFoundries |
| P279 | subclass of | ... | Q622938 (photolithography) | photolithography |
| P646 | Freebase ID | /m/0b32s_ |
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log id: 6055664