Wikidata entity: Q3596942
| P156 | followed by | ... | Q4643915 (7 nm lithography process) | 7 nm lithography process |
| P155 | follows | ... | Q107090889 (11 nm lithography process) | 11 nm lithography process |
| P176 | manufacturer | ... | Q713418 (TSMC) | TSMC |
| P248 | stated in | ... | Q1428079 (International Technology Roadmap for Semiconductors) | International Technology Roadmap for Semiconductors |
| P279 | subclass of | ... | Q622938 (photolithography) | photolithography |
| P646 | Freebase ID | /m/03ybpgl |
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log id: 6487385