Wikidata entity: Q4643915
| P4969 | derivative work | ... | Q130272508 (6 nm lithography process) | 6 nm lithography process |
| P156 | followed by | ... | Q4641190 (5 nm lithography process) | 5 nm lithography process |
| P155 | follows | ... | Q3596942 (10 nm lithography process) | 10 nm lithography process |
| P31 | instance of | ... | Q1408288 (manufacturing process) | manufacturing process |
| P176 | manufacturer | ... | Q713418 (TSMC) | TSMC |
| P248 | stated in | ... | Q1428079 (International Technology Roadmap for Semiconductors) | International Technology Roadmap for Semiconductors |
| P279 | subclass of | ... | Q622938 (photolithography) | photolithography |
| P646 | Freebase ID | /m/0gvr_7k |
| P12029 | WikiChip article ID | 7_nm_lithography_process |
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